產(chǎn)品名稱 |
產(chǎn)品規(guī)格 |
精度等級 |
|||
0級 |
1級 |
2級 |
3級 |
||
平面度公差(um) |
|||||
研磨平臺 |
100*200 |
4.9 |
9.8 |
19.6 |
|
200*200 |
5 |
10.3 |
20.5 |
|
|
200*300 |
5.5 |
10.9 |
21.8 |
|
|
300*400 |
6 |
12 |
24 |
|
|
400*400 |
6.5 |
12.5 |
25.1 |
|
|
400*500 |
6.5 |
13.1 |
26.2 |
65.6 |
|
500*500 |
7 |
13.8 |
27.5 |
68.8 |
|
500*600 |
7 |
14.2 |
28.5 |
71.2 |
|
500*800 |
8 |
15.5 |
31 |
78 |